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Sog. Nadelkarte, - im Wesentlichen bestehend aus einem rahmenähnlichen Metallträger mit einer annähernd rechteckigen gedruckten Schaltung, bestückt mit einem Probe Head (Prüfkopf mit Kontaktnadeln) sowie mit passiven und aktiven Bauelementen, - zum Herstellen einer elektrischen Verbindung zwischen einem Wafer (Halbleiterscheibe) und dem Wafer Prober (beides nicht Gegenstand dieser vZTA-Entscheidung) sowie zur Positionssteuerung des Wafer Proberarms (nicht Gegenstand dieser vZTA-Entscheidung), - mit unterschiedlicher Nadelanordnung auf dem Probe Head, - ohne Messvorrichtung, ohne aktive Bauelemente für das Messgerät, - erkennbares Teil eines Wafer-Probers (mit Handling- und Positioniervorrichtung) der Position 8536, - noch nicht zusammengesetzt mit nicht chakterbestimmendem Beipack (CD-ROM) in einem besonders gestalteten und zum dauernden Gebrauch bestimmten Koffer, in einem Karton für den Einzelverkauf aufgemacht. Die Ware ist als "Teil, erkennbar ausschließlich für elektrische Geräte der Position 8536 bestimmt, für Waferprober der Unterposition 8536 9020, keine zusammengesetzte elektronische Schaltung (Baugruppe)" einzureihen. Anlage: 2 Abbildungen

FOUR POINT PROBES THAT PROVIDE A POINT OF CONTACT FOR A SEMICONDUCTOR DEVICE SO THAT A CURRENT CAN BE DRIVEN THROUGH THE SAMPLE AND A RESULTANT VOLTAGE DROP MEASURED. THE PROBES HAVE TUNGSTEN CARBIDE NEEDLES FOR DURABILITY AND ELECTRICAL CONDUCTIVITY AND THE NEEDLES ARE INDIVIDUALLY SPRING LOADED. THESE ARE SPARE/CONSUMABLE PARTS FOR WAFER PROBERS.

FOUR POINT RESISTIVITY PROBE HEADS THAT PROVIDE A MEANS OF MAKING ELECTRICAL CONTACT AT EACH POINT ON A CONDUCTING OR SEMICONDUCTING MATERIAL. THE NEEDLES ARE TUNGSTEN CARBIDE RODS WHOSE TIPS ARE GROUND AND POLISHED. THE NEEDLES HAVE A MEANS OF ELECTRICAL CONTACT VIA A LEAD OR PLUG TO AN ELECTRONIC MEASUREMENT APPARATUS. THE NEEDLES ARE GUIDED AND ELECTRICALLY INSULATED BY PIERCED JEWELS AND ARE INDIVIDUALLY SPRING LOADED. THE OBJECTIVE OF THE ELCTRICAL CONTACT IS TO FACILITATE THE PASSING OF A CURRENT AND MEASUREMENT OF A VOLTAGE IN ORDER TO DETERMINE THE RESISTIVITY OF THE TARGET MATERIAL..FEATURES: ALUNINIUM ALLOY UPPER AND LOWER GUIDES ARE BOTH JEWELLED. SOLID TUNGSTEN CARBIDE NEEDLES OFFER SUPERIOR DURABILITY, PTFE INSULATION GIVES MINIMUM LEAKAGE, LOADS CHECKED BY ELECTRONIC GUAGE, SPACING AND TIP RADII OPTICALLY CHECKED FOR ACCURACY BY INTERFEROMETER.

MICROPOSITION PROBE STAND UNIT IS USED TO FACILITATE CONTACT OF A FOUR POINT PROBE WITH SMALL SEMICONDUCTOR TEST SAMPLES. THE TEST MATERIAL IS PLACED ON A HARD ANODISED ALUMINIUM RITARY STAGE, WHICH CAM BE MOVED IN X-Y MOTION BY USE OF MICROMETER SCREW GAUGES WITH OPTICAL VACUUM RETENTION. THE USER BRINGS THE FOUR POINT PROBE INTO CONTACT WITH THE TEST MATERIAL VIA USE OF A LEVER AND FACILITATES THE PASSING OF A CURRENT THROUGH THE SAMPLE AND MEASUREMENT OF THE RESULTING VOLTAGE DROP. TYPICALLY USED IN RESEARCH APPLICATIONS THIS ENABLES THE RESISTIVITY OF THE TEST MATERIAL TO BE DETERMINED.

MULTIHEIGHT MICROPOSITION PROBE STAND. THIS PROBE STAND HOLDS A FOUR POINT PROBE FOR MEASUREMENT OF SEMICONDUCTOR MATERIALS. THE UNIT COMPRISES A LARGE HARD ANODISED ALUMINIUM BASE, A STAINLESS STEEL UPRIGHT POLE, AND A DELRIN RAISING AND LOWERING MECHANISM WHICH ATTACHES TO THE POLE AT USER DEFINED HEIGHTS. THE UNIT HAS A REMOVABLE X-Y STAGE WHICH CAN MANIPULATE SMALL SAMPLES IN X-Y-THETA MOTION BY USE OF MICROMETER SCREW GAUGES, AND WITH OPTICAL VACUUM RETENTION.SAMPLES OF VARYING THICKNESSES CAN THEREFORE BE MEASURED. THE FOUR POINT PROBE IS LOWERED ONTO A TEST SAMPLE AND THE FOUR NEEDLES MAKE A SPRING LOADED ELECTRICAL CONTACT. THE OBKECTIVE IS TO PASS A CURRENT THROUGH TWO NEEDLES AND MEASURE A VOLTAGE DROP ACROSS THE OTHER TWO NEEDLES IN ORDER TO ASSESS THE RESISTIVITY OF THE TEST SAMPLE.

MULTIHEIGHT PROBE. THIS PROBE STAND HOLDS A FOUR POINT PROBE FOR MEASUREMENT OF SEMICONDUCTOR MATERIALS. THE UNIT COMPRISES A LARGE HARD ANODISED ALUMINIUM BASE, A STAINLESS STEEL UPRIGHT POLE, AND A DELRIN RAISING AND LOWERING MECHANISM WHICH ATTACHES THE POLE AT USER DEFINED HEIGHTS, SAMPLES OF VARYING THICKNESS CAN THEREFORE BE MEASURED. THE FOUR POINT PROBE IS LOWERED ONTO THE TEST SAMPLE AND THE FOUR NEEDLES MAKE A SPRING LOADED ELECTRICAL ATTACHMENT. THE OBJECTIVE IS TO PASS A CURRENT THROUGH TWO NEEDLES AND MEASURE A VOLTAGE DROP ACROSS THE OTHER TWO NEEDLES IN ORDER TO ASSESS THE RESISTIVITY OF THE TEST SAMPLE.