Materials Processing
Bellows-sealed scroll-type compressors and bellows-sealed scroll-type vacuum pumps having all of the following: a. Capable of an inlet volume flow rate of 50 m^3/h or greater; b. Capable of a pressure ratio of 2:1 or greater; and c. Having all surfaces that come in contact with the process gas made from any of the following materials: 1. Aluminium or aluminium alloy; 2. Aluminium oxide; 3. Stainless steel; 4. Nickel or nickel alloy; 5. Phosphor bronze; or 6. Fluoropolymers.