GB1189823428486100000
A VACUUM ELEVATOR, USED IN THE DELIVERY SYSTEM OF A PLASMA ETCHING DEVICE FOR THE PRODUCTION OF SILICON WAFERS. THE ELEVATOR TRANSPORTS WAFERS FRP, 4 TO 12 INCHES FROM THE CASETTE WHERE THE WAFERS ARE STORED, TO THE PROCESSING AREA BY WAY OF VACUUM ELEVATION. ANY TYPE OF MATERIAL CAN BE HANDLED INCLUDING SILICON, GALLIUM ARSENIDE AND FLAT PANEL DISPLAYS. ADDITIONAL FEATURES: PRECISE TO 0.001 INCH; VACUUM COMPATIBLE; ZERO BACKLASH; STAINLESS STEEL BELLOWS SEAL; FAST 1 INCH PER SECOND SPEED; DRIVE TO ANY POSITION; SERIAL PORT FOR EXTERNAL CONTROL.