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CLEAN KIT FOR SPUTTERING MACHINE. THE KIT IS COMPRISED OF THE FOLLOWING COMPONENTS: A LOWER SHIELD, INNER SHIELD, UPPER SHIELD, COVER RING, DEPOSITION RING, SHUTTER DISK, INNER SHIELD CLAMP AND LOWER SHIELD CLAMP. THE COMPONENTS ARE STACKED/INTERMESHED ON TOP OF EACH OTHER. THEY ENCAPSULATE THE SEMICONDUCTOR WAFER FROM THE WALLS OF THE HIGH VACUUM CHAMBER OF THE SPUTTERING MACHINE, ALLOWING CONTROLLED SPUTTERING TO TAKE PLACE AND PREVENTING METAL DEPOSITION ON THE CHAMBER WALLS. THE COMPONENTS ARE PRESENTED TOGETHER, UNASSEMBLED, IN A CASE.

THIS SYSTEM IS CONFIGURED FOR ION BEAM ETCH (IBE) ONLY AND IS SUPPLIED WITH THE FOLLOWING CONFIGURATION; STAINLESS STEEL PROCESS CHAMBER WITH EXCHANGEABLE LINERS SYSTEM CONSOLE WATER COOLED SUBSTRATE HOLDER AND HELIUM "BACKSIDE COOLING" COMPUTER CONTROL ION SOURCE / OPTICS VACUUM MEASUREMENT GAS SUPPLY PUMPING SYSTEM TRANSFER STATION VACUUM CASSETTE STATION SIMS. THE SYSTEM IS CONFIGURED TO PERFORM THE FOLLOWING PROCESSES: ETCHING OF SIO2, AU, CR, RU, TI, PT, CU, TIW, CO, AG, NI, TINI, TA, AL2O3, TAN, PD, CAF2, FE, MGO, PZT, IEMN, CUN, NIFE, CR2O3 & CMT AND IS CONFIGURED FOR THE ETCHING OF NEW TYPES OF SENSORS INCLUDING FORCE AND PRESSURE SENSORS. FOR MEDICAL AND SCIENTIFIC APPLICATIONS.

PELLICLE. THIS PRODUCT IS USED IN THE SEMICONDUCTOR INDUSTRY TO PROTECT THE SURFACE OF A PHOTOMASK FROM LOOSE PARTICULATE. IT CONSISTS OF AN ANODISED ALUMINIUM FRAME WITH A SUBMICRON CELLULOSE OR FLUROPOLYMER MEMBRANE. IT IS ATTACHED TO THE PHOTOMASK WITH PRE-ADDITIVE ADHESIVE USING A PRESSURISED PELLICLE MOUNTING TOOL. THEY ARE IMPORTED PACKAGED IN BESPOKE TWO PART MOULDED CASES MADE FROM SOFT OR HARD PLASTIC.

PELLICLE. THIS PRODUCT IS USED IN THE SEMICONDUCTOR INDUSTRY TO PROTECT THE SURFACE OF A PHOTOMASK FROM LOOSE PARTICULATE. IT CONSISTS OF AN ANODISED ALUMINIUM FRAME WITH A SUBMICRON CELLULOSE OR FLUROPOLYMER MEMBRANE. IT IS ATTACHED TO THE PHOTOMASK WITH PRE-ADDITIVE ADHESIVE USING A PRESSURISED PELLICLE MOUNTING TOOL. THEY ARE IMPORTED PACKAGED IN BESPOKE TWO PART MOULDED CASES MADE FROM SOFT OR HARD PLASTIC.

ROTARY TABLE USED WITH A LATHE OR MILLING MACHINE. PRODUCT COMPRISES OF A DEVICE THAT WILL ROTATE A WORK PIECE BY PRE-PROGRAMMED AMOUNT (EG. 90 DEGREES),TO ENABLE THE WORK PIECE TO BE MACHINED BY A LATHE OR MILLING MACHINE. THERE MAY BE SEVERAL STAGES IN THE MACHINING PROCESS AND THE ROTARY TABLE CAN BE PROGRAMMED TO ROTATE AT SET INTERVALS AFTER EACH MACHINING PROCESS HAS BEEN COMPLETED. A SEPARATE CONTROL UNIT IS ATTACHED TO THE ROTARY TABLE TO PROGRAM IT. THE ROTARY TABLE CONSISTS OF A ROUND MOUNTING PLATE MADE FROM STEEL (FOR THE WORK PIECE OR FOR THE ATTACHMENT OF A CHUCK OR OTHER ACCESSORY) AND GEARS WITH AN ELECTRIC MOTOR TO ROTATE THE MOUNTING PLATE VIA THE GEARS. THE PACKAGING IS NORMALLY A WOODEN BASE LIKE A SMALL PALLET, WITH A BROWN CARDBOARD COVER SHOWING THE COMPANY NAME. EACH UNIT HAS A UNIQUE SERIAL NUMBER WHICH IS ALSO ON THE BOX. THE PRODUCT IS AVAILABLE IN DIFFERENT SIZES AND SHAPES DEPENDING ON WHAT MACHINE THEY ARE INTENDED TO BE FITTED INTO, BUT THEY ALL FUNCTION THE SAME WAY.