CHILLER UNIT. A HEATED FLUID CIRCULATOR USED IN THE TEMPERATURE REGULATION OF ETCH EQUIPMENT. THE HEAT ENERGY IS TRANSFERRED TO THE EQUIPMENT VIA A CLOSED LOOP, PUMPED PROCESS FLUID, CIRCUIT FROM THE UNIT.THE TEMPERATURE OF THE PROCESS FLUID IS MAINTAINED BY SOFTWARE CONTROLLED CARTRIDGE HEATERS OF APPROXIMATELY 7KW RATING. THE UNIT IS FITTED TO DEPOSITION AND ETCH EQUIPMENT USED IN THE SEMICONDUCTOR MANUFACTURING INDUSTRY.IT IS USED TO PROVIDE A COOLING MEDIUM WHICH EXTRACTS THE HEAT FROM PROCESS MODULES WHEN IN USE.

THE CLASSIFICATION IS DETERMINED ACCORDING TO GIRS 1 AND 6. CN CODE 84198998 OTHER MACHINERY, PLANT AND EQUIPMENT-OTHER.NOTE 2(A) TO SECTION XV1.