CHILLER UNIT. A REFRIGERATED FLUID CIRCULATOR USED IN THE TEMPERATURE REGULATION OF ETCH TOOLS.THE UNIT IS USED IN THE SEMICONDUCTOR MANUFACTURING INDUSTRY TO PROVIDE A COOLING MEDIUM WHICH EXTRACTS HEAT FROM PROCESS MODULES WHEN IN USE.HEAT ENERGY IS TRANSFERRED FROM THE EQUIPMENT VIA A CLOSED LOOP ,PUMPED PROCESS, FLUID CIRCUIT TO THE UNIT. PROCESS FLUID TEMPERATURES ARE IN THE OPERATING RANGE OF MINUS 30 CENTIRGADE TO PLUS 90 CENTIGRADE.

THE CLASSIFICATION IS DETERMINED ACCORDING TO GIRS 1 AND 6. CN CODE 84198998 OTHER MACHINERY, PLANT AND EQUIPMENT-OTHER.NOTE 2(A) TO SECTION XV1.